Results showed that, a uniform line-shaped plasma is generated as waveguide width decreased to 58 mm, plasma density value n res = 3.7 × 10 11 cm −3, and discharge tube insertion depth = 0 mm. The effects of the waveguide width, power level (electron density, and discharge tube insertion depth on the excited axial (along x) electric field profile and hence the uniformity of the produced plasmas are investigated numerically using commercial software CST Microwave Studio R, and charge coupled device (CCD) camera. The microwave power is coupled to the discharge gas via the slot. The line-shaped plasmas have been generated in a rectangular Pyrex tube, 15 mm in height and 5 mm inner width placed-in a linear slot made in the upper wide wall of a custom-made narrow rectangular waveguide. In the following, numerical and experimental results for a line-shaped argon plasma source over a wide range of gas pressure (2–50 Torr) and microwave power (200–800 W) are presented.
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